Custom Sputtering Targets

Custom Sputtering Targets Solution

Advanced Targets specialize in manufacturing custom sputtering targets tailored to meet the specific needs of your thin-film deposition processes. Whether you're working on advanced semiconductor wafers, optical coatings, or R&D applications, we offer flexible solutions designed to match your technical requirements and system compatibility.


What Custom Sputtering Targets  Service We Offer

Service CategoryDetails
Custom MaterialsPure Metals: Ti, Al, Cu, W, Mo, Ta, Ni, Cr
Alloys: AlTi, TiW, NiCr, TaNb
Compounds: ITO, TiN, AlN, TaN, ZnO, etc.
Customized DimensionsShapes: Round / Disc, Rectangular / Plate, Tubular / Rotatable
Sizes: 1" to 12" (or larger)
Thickness and edge design tailored to your requirements
Purity Levels99.9%, 99.99%, and ultra-high purity 99.999% (depending on application sensitivity)
Bonding ServicesIndium bonding (ideal for good thermal transfer)
Elastomer bonding (suitable for some compound targets)
Backplate materials: Cu, Mo, W, stainless steel
Surface FinishPrecision-machined and polished surfaces for uniform film deposition and system compatibility


Custom Sputtering Target

Custom Sputtering Targets Based on Applications

ApplicationCommon MaterialsTypical Custom Requirements
SemiconductorSi, Ti, Ta, W, Cu, Al, Co, NiHigh purity, low impurity, precise dimensions, stable sputtering rate
Optical CoatingSiO₂, TiO₂, Nb₂O₅, Ta₂O₅, ITOOptical performance, composition control, surface quality
Display & Touch PanelITO, AZO, Mo, Al, CuLarge-size target, high density, uniform deposition
Solar Thin FilmCIGS, CdTe, Mo, AZO, ITOLarge area coating, composition stability, long service life
PVD Decorative CoatingTi, Cr, Zr, TiAl, AlCrAlloy composition, coating color, wear resistance
Laboratory ResearchMetals, alloys, ceramics, oxidesSmall quantity, customized size, flexible specifications


Main Uses of Custom Sputtering Targets

  1. Semiconductor Devices – Depositing metal and barrier layers (e.g., Al, Cu, TiN, TaN) for interconnects, contacts, and diffusion barriers in IC chips.

  2. Thin-Film Transistors (TFTs) – Forming the active channel layer (e.g., ITO, IGZO, a-Si) and metal electrodes (e.g., Al, Mo) in flat-panel display backplanes.

  3. Optical Coatings – Creating anti-reflection (AR) coatings, bandpass filters, mirrors, and high-reflection layers for lenses, cameras, and optical instruments.

  4. Magnetic Storage Media – Depositing magnetic layers (e.g., CoCrPt, FePt) and protective carbon overcoats for hard disk drive platters.

  5. Solar Cells – Forming transparent conductive oxides (TCOs like ITO, ZnO:Al), buffer layers (CdS), and metal contacts (Ag, Al) in photovoltaic devices.

  6. MEMS & Sensors – Patterning piezoelectric films (AlN, ZnO), electrode layers (Pt, Au), and sacrificial layers for micro-mechanical systems and sensor structures.

  7. Wear-Resistant and Decorative Coatings – Depositing hard coatings (TiN, CrN, AlTiN) for cutting tools, and decorative finishes (e.g., gold-like TiN, black Cr) on watches, hardware, and automotive parts.

  8. Energy-Efficient Glass (Low-E Glass) – Coating glass with multiple thin layers (e.g., silver, ITO, Si₃N₄) to reflect infrared heat while transmitting visible light for building windows.


How to Select the Right Custom Sputtering Target

Selection FactorWhat You Need to Confirm
ApplicationSemiconductor, optical coating, PVD, solar, display or research
Target MaterialRequired metal, alloy, ceramic or oxide material
Purity RequirementFilm performance and process requirements
Equipment CompatibilitySputtering system model and target installation method
Target DimensionDiameter, length, width and thickness
Deposition MethodDC sputtering, RF sputtering or magnetron sputtering
QuantityTrial production or mass production



Custom Sputtering Targets

Main Steps in the Manufacturing of Custom Sputtering Targets

StepManufacturing StageDescription
1Raw Material Selection & PurificationHigh-purity raw materials (metals, alloys, compounds) are selected. Purification may involve chemical refining, vacuum melting, or zone refining.
2Powder Preparation (if applicable)For ceramic or composite targets, powders are prepared via solid-state reaction, sol-gel, or spray drying methods.
3FormingThe material is shaped into a target blank using: hot pressing, cold isostatic pressing (CIP), casting (for metals), hot isostatic pressing (HIP), or sintering (for ceramics). The formed blank is sintered at high temperature to increase density and improve mechanical strength.
4Hot Forging or Rolling (for metals)Used to refine grain structure and improve material uniformity and sputtering behavior.
5Machining & Surface FinishingPrecision machining to meet required dimensions, tolerances, and surface smoothness (Ra). Surface polishing is done for better film uniformity.
6Bonding (if needed)Targets are bonded to a backing plate using indium or elastomer bonding to improve heat dissipation during sputtering.
7Inspection & Quality ControlRigorous testing for: purity (using GDMS or ICP-MS), density, grain size, bonding strength, surface flatness and roughness.


Why Choose Our Custom Sputtering Targets | Advanced Targets

  1. Strict QC & traceability – Partner with national lab, powder metallurgy, GDMS/ICP-MS testing.

  2. Fast prototype & small batch – Short lead time via powder route + CAS R&D support.

  3. Scalable mass production – High-Tech Enterprise, stable output of multi-component alloys.

  4. New material development support – Joint R&D with CAS & USTB, help solve sputtering issues.

  5. Flexible MOQ & global shipping – Low MOQ, export compliant, customer-first service.


FAQ

1. What information do I need to provide for a custom sputtering target?

You should provide target material, purity requirement, dimensions, application, sputtering equipment model and quantity. These details help us recommend the most suitable target solution.

2. Can you manufacture sputtering targets according to our equipment dimensions?

Yes. Custom sputtering targets can be produced according to your existing sputtering system specifications, including shape, size and bonding requirements.


3. What materials can be customized for sputtering targets?

We provide customized sputtering targets in metals, alloys, ceramics and oxide materials, including aluminum, titanium, chromium, silicon, ITO, AZO and other materials.


4. What purity levels are available for custom sputtering targets?

Purity requirements depend on the application. Semiconductor and electronic applications usually require higher purity levels, while decorative coating applications may have different requirements.


5. Can you produce small quantities for research projects?

Yes. Custom sputtering targets can be supplied for laboratory testing, R&D projects and pilot production.


6. What sputtering target shapes can you manufacture?

Common customized shapes include:


7. Do you provide bonded sputtering targets?

Yes. Bonding options can be customized according to your sputtering equipment requirements.


8. How long does it take to manufacture custom sputtering targets?

Production time depends on material, size, quantity and manufacturing complexity.


9. How do you ensure sputtering target quality?

Quality control includes:


10. What is the difference between standard and custom sputtering targets?

Standard targets are produced in common specifications, while custom targets are optimized for your deposition system, film requirements and application conditions.

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